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Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control
Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control
상세정보
- 자료유형
- 학위논문파일 국외
- 최종처리일시
- 20220210093300
- ISBN
- 9798516062063
- DDC
- 660
- 저자명
- Zhang, Yichi.
- 서명/저자
- Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control
- 발행사항
- [Sl] : University of California, Los Angeles, 2021
- 발행사항
- Ann Arbor : ProQuest Dissertations & Theses, 2021
- 형태사항
- 152 p
- 주기사항
- Source: Dissertations Abstracts International, Volume: 82-12, Section: B.
- 주기사항
- Advisor: Christofides, Panagiotis D.
- 학위논문주기
- Thesis (Ph.D.)--University of California, Los Angeles, 2021.
- 사용제한주기
- This item must not be sold to any third party vendors.
- 일반주제명
- Chemical engineering
- 일반주제명
- Fluid mechanics
- 키워드
- Control
- 키워드
- Machine learning
- 기타저자
- University of California, Los Angeles Chemical Engineering 0294
- 기본자료저록
- Dissertations Abstracts International. 82-12B.
- 기본자료저록
- Dissertation Abstract International
- 전자적 위치 및 접속
- 로그인 후 원문을 볼 수 있습니다.
MARC
008220131s2021 us c eng d■001000016052491
■00520220210093300
■020 ▼a9798516062063
■035 ▼a(MiAaPQ)AAI28543774
■040 ▼aMiAaPQ▼cMiAaPQ
■0820 ▼a660
■1001 ▼aZhang, Yichi.
■24510▼aMultiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control
■260 ▼a[Sl]▼bUniversity of California, Los Angeles▼c2021
■260 1▼aAnn Arbor▼bProQuest Dissertations & Theses▼c2021
■300 ▼a152 p
■500 ▼aSource: Dissertations Abstracts International, Volume: 82-12, Section: B.
■500 ▼aAdvisor: Christofides, Panagiotis D.
■5021 ▼aThesis (Ph.D.)--University of California, Los Angeles, 2021.
■506 ▼aThis item must not be sold to any third party vendors.
■590 ▼aSchool code: 0031.
■650 4▼aChemical engineering
■650 4▼aFluid mechanics
■653 ▼aAtomic layer deposition
■653 ▼aComputational fluid dynamics
■653 ▼aControl
■653 ▼aKinetic Monte Carlo
■653 ▼aMachine learning
■653 ▼aPlasma enhanced atomic layer deposition
■690 ▼a0542
■690 ▼a0204
■71020▼aUniversity of California, Los Angeles▼bChemical Engineering 0294.
■7730 ▼tDissertations Abstracts International▼g82-12B.
■773 ▼tDissertation Abstract International
■790 ▼a0031
■791 ▼aPh.D.
■792 ▼a2021
■793 ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T16052491▼nKERIS▼z이 자료의 원문은 한국교육학술정보원에서 제공합니다.
■980 ▼a202202▼f2022
