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Rotary Inchworm Motor for Underwater Microrobot Propulsion : Un motor rotatorio electroestatico para la propulsion de microrobots submarinos
Rotary Inchworm Motor for Underwater Microrobot Propulsion  : Un motor rotatorio electroes...
Rotary Inchworm Motor for Underwater Microrobot Propulsion : Un motor rotatorio electroestatico para la propulsion de microrobots submarinos

Detailed Information

자료유형  
 학위논문 서양
최종처리일시  
20250211152756
ISBN  
9798384450276
DDC  
620
저자명  
Bustamante Eguiguren, Mauricio J.
서명/저자  
Rotary Inchworm Motor for Underwater Microrobot Propulsion : Un motor rotatorio electroestatico para la propulsion de microrobots submarinos
발행사항  
[Sl] : University of California, Berkeley, 2024
발행사항  
Ann Arbor : ProQuest Dissertations & Theses, 2024
형태사항  
88 p
주기사항  
Source: Dissertations Abstracts International, Volume: 86-03, Section: B.
주기사항  
Advisor: Maharbiz, Michel;Pister, Kristofer S. J.
학위논문주기  
Thesis (Ph.D.)--University of California, Berkeley, 2024.
초록/해제  
요약Swimming microrobots have significant potential for biomedical applications and distributed sensing. To date, most work has relied on external fields for control control. To achieve autonomy, locally controllable propulsion mechanisms must be developed. This thesis presents an rotary inchworm motor designed to drive an artificial flagellum, inspired by bacterial flagellar motors found in nature. The design adapts electrostatic gap closing actuators with angled arms for rotational motion. The devices are fabricated in an SOI process with a bonded lid featuring through-wafer vias as a mechanical feedthrough for the flagellum. A hydrophobic coating is applied to prevent water ingress through small gaps, thus keeping the gap closing actuators dry. This process also provides an additional layer of routing for reduced complexity. Motors with rotation rates up to 633 rpm at actuation frequencies of 1.7 kHz are demonstrated to operate reliably in dry conditions. Additionally, promising electrical and optical results are presented, preventing water ingress to gap-closing actuators at low pressures. Effective operation of the mechanism underwater remains a challenge.
일반주제명  
Engineering
일반주제명  
Biomedical engineering
일반주제명  
Electrical engineering
키워드  
Swimming microrobots
키워드  
Biomedical applications
키워드  
Artificial flagellum
키워드  
Electrostatic gap
키워드  
Bacterial flagellar
기타저자  
University of California, Berkeley Electrical Engineering & Computer Sciences
기본자료저록  
Dissertations Abstracts International. 86-03B.
전자적 위치 및 접속  
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MARC

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■1001  ▼aBustamante  Eguiguren,  Mauricio  J.
■24510▼aRotary  Inchworm  Motor  for  Underwater  Microrobot  Propulsion  ▼bUn  motor  rotatorio  electroestatico  para  la  propulsion  de  microrobots  submarinos
■260    ▼a[Sl]▼bUniversity  of  California,  Berkeley▼c2024
■260  1▼aAnn  Arbor▼bProQuest  Dissertations  &  Theses▼c2024
■300    ▼a88  p
■500    ▼aSource:  Dissertations  Abstracts  International,  Volume:  86-03,  Section:  B.
■500    ▼aAdvisor:  Maharbiz,  Michel;Pister,  Kristofer  S.  J.
■5021  ▼aThesis  (Ph.D.)--University  of  California,  Berkeley,  2024.
■520    ▼aSwimming  microrobots  have  significant  potential  for  biomedical  applications  and  distributed  sensing.  To  date,  most  work  has  relied  on  external  fields  for  control  control.  To  achieve  autonomy,  locally  controllable  propulsion  mechanisms  must  be  developed.  This  thesis  presents  an  rotary  inchworm  motor  designed  to  drive  an  artificial  flagellum,  inspired  by  bacterial  flagellar  motors  found  in  nature.  The  design  adapts  electrostatic  gap  closing  actuators  with  angled  arms  for  rotational  motion.  The  devices  are  fabricated  in  an  SOI  process  with  a  bonded  lid  featuring  through-wafer  vias  as  a  mechanical  feedthrough  for  the  flagellum.  A  hydrophobic  coating  is  applied  to  prevent  water  ingress  through  small  gaps,  thus  keeping  the  gap  closing  actuators  dry.  This  process  also  provides  an  additional  layer  of  routing  for  reduced  complexity.  Motors  with  rotation  rates  up  to  633  rpm  at  actuation  frequencies  of  1.7  kHz  are  demonstrated  to  operate  reliably  in  dry  conditions.  Additionally,  promising  electrical  and  optical  results  are  presented,  preventing  water  ingress  to  gap-closing  actuators  at  low  pressures.  Effective  operation  of  the  mechanism  underwater  remains  a  challenge.
■590    ▼aSchool  code:  0028.
■650  4▼aEngineering
■650  4▼aBiomedical  engineering
■650  4▼aElectrical  engineering
■653    ▼aSwimming  microrobots
■653    ▼aBiomedical  applications
■653    ▼aArtificial  flagellum
■653    ▼aElectrostatic  gap
■653    ▼aBacterial  flagellar
■690    ▼a0537
■690    ▼a0544
■690    ▼a0541
■71020▼aUniversity  of  California,  Berkeley▼bElectrical  Engineering  &  Computer  Sciences.
■7730  ▼tDissertations  Abstracts  International▼g86-03B.
■790    ▼a0028
■791    ▼aPh.D.
■792    ▼a2024
■793    ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17163807▼nKERIS▼z이  자료의  원문은  한국교육학술정보원에서  제공합니다.

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