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Rotary Inchworm Motor for Underwater Microrobot Propulsion : Un motor rotatorio electroestatico para la propulsion de microrobots submarinos
Rotary Inchworm Motor for Underwater Microrobot Propulsion : Un motor rotatorio electroestatico para la propulsion de microrobots submarinos
상세정보
- 자료유형
- 학위논문 서양
- 최종처리일시
- 20250211152756
- ISBN
- 9798384450276
- DDC
- 620
- 서명/저자
- Rotary Inchworm Motor for Underwater Microrobot Propulsion : Un motor rotatorio electroestatico para la propulsion de microrobots submarinos
- 발행사항
- [Sl] : University of California, Berkeley, 2024
- 발행사항
- Ann Arbor : ProQuest Dissertations & Theses, 2024
- 형태사항
- 88 p
- 주기사항
- Source: Dissertations Abstracts International, Volume: 86-03, Section: B.
- 주기사항
- Advisor: Maharbiz, Michel;Pister, Kristofer S. J.
- 학위논문주기
- Thesis (Ph.D.)--University of California, Berkeley, 2024.
- 초록/해제
- 요약Swimming microrobots have significant potential for biomedical applications and distributed sensing. To date, most work has relied on external fields for control control. To achieve autonomy, locally controllable propulsion mechanisms must be developed. This thesis presents an rotary inchworm motor designed to drive an artificial flagellum, inspired by bacterial flagellar motors found in nature. The design adapts electrostatic gap closing actuators with angled arms for rotational motion. The devices are fabricated in an SOI process with a bonded lid featuring through-wafer vias as a mechanical feedthrough for the flagellum. A hydrophobic coating is applied to prevent water ingress through small gaps, thus keeping the gap closing actuators dry. This process also provides an additional layer of routing for reduced complexity. Motors with rotation rates up to 633 rpm at actuation frequencies of 1.7 kHz are demonstrated to operate reliably in dry conditions. Additionally, promising electrical and optical results are presented, preventing water ingress to gap-closing actuators at low pressures. Effective operation of the mechanism underwater remains a challenge.
- 일반주제명
- Engineering
- 일반주제명
- Biomedical engineering
- 일반주제명
- Electrical engineering
- 기타저자
- University of California, Berkeley Electrical Engineering & Computer Sciences
- 기본자료저록
- Dissertations Abstracts International. 86-03B.
- 전자적 위치 및 접속
- 로그인 후 원문을 볼 수 있습니다.
MARC
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■00520250211152756
■006m o d
■007cr#unu||||||||
■020 ▼a9798384450276
■035 ▼a(MiAaPQ)AAI31555793
■040 ▼aMiAaPQ▼cMiAaPQ
■0820 ▼a620
■1001 ▼aBustamante Eguiguren, Mauricio J.
■24510▼aRotary Inchworm Motor for Underwater Microrobot Propulsion ▼bUn motor rotatorio electroestatico para la propulsion de microrobots submarinos
■260 ▼a[Sl]▼bUniversity of California, Berkeley▼c2024
■260 1▼aAnn Arbor▼bProQuest Dissertations & Theses▼c2024
■300 ▼a88 p
■500 ▼aSource: Dissertations Abstracts International, Volume: 86-03, Section: B.
■500 ▼aAdvisor: Maharbiz, Michel;Pister, Kristofer S. J.
■5021 ▼aThesis (Ph.D.)--University of California, Berkeley, 2024.
■520 ▼aSwimming microrobots have significant potential for biomedical applications and distributed sensing. To date, most work has relied on external fields for control control. To achieve autonomy, locally controllable propulsion mechanisms must be developed. This thesis presents an rotary inchworm motor designed to drive an artificial flagellum, inspired by bacterial flagellar motors found in nature. The design adapts electrostatic gap closing actuators with angled arms for rotational motion. The devices are fabricated in an SOI process with a bonded lid featuring through-wafer vias as a mechanical feedthrough for the flagellum. A hydrophobic coating is applied to prevent water ingress through small gaps, thus keeping the gap closing actuators dry. This process also provides an additional layer of routing for reduced complexity. Motors with rotation rates up to 633 rpm at actuation frequencies of 1.7 kHz are demonstrated to operate reliably in dry conditions. Additionally, promising electrical and optical results are presented, preventing water ingress to gap-closing actuators at low pressures. Effective operation of the mechanism underwater remains a challenge.
■590 ▼aSchool code: 0028.
■650 4▼aEngineering
■650 4▼aBiomedical engineering
■650 4▼aElectrical engineering
■653 ▼aSwimming microrobots
■653 ▼aBiomedical applications
■653 ▼aArtificial flagellum
■653 ▼aElectrostatic gap
■653 ▼aBacterial flagellar
■690 ▼a0537
■690 ▼a0544
■690 ▼a0541
■71020▼aUniversity of California, Berkeley▼bElectrical Engineering & Computer Sciences.
■7730 ▼tDissertations Abstracts International▼g86-03B.
■790 ▼a0028
■791 ▼aPh.D.
■792 ▼a2024
■793 ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17163807▼nKERIS▼z이 자료의 원문은 한국교육학술정보원에서 제공합니다.
