서브메뉴
검색
Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures
Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures
상세정보
- 자료유형
- 학위논문 서양
- 최종처리일시
- 20250211151504
- ISBN
- 9798384052371
- DDC
- 535
- 서명/저자
- Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures
- 발행사항
- [Sl] : University of Colorado at Boulder, 2024
- 발행사항
- Ann Arbor : ProQuest Dissertations & Theses, 2024
- 형태사항
- 193 p
- 주기사항
- Source: Dissertations Abstracts International, Volume: 86-03, Section: B.
- 주기사항
- Advisor: Murnane, Margaret M.
- 학위논문주기
- Thesis (Ph.D.)--University of Colorado at Boulder, 2024.
- 초록/해제
- 요약Nanoscale fabrication has progressed to the level where detailed near-nanometer structures can be routinely produced. As fabrication scales shrink to atomistic scales, a corresponding need for high-precision characterization is in demand. Extreme ultraviolet light (EUV) for patterning small- scale features has seen considerable development and application in recent years. Similarly, EUV light offers outstanding advantages for characterization and metrology. In particular, by utilizing a coherent EUV source, detailed nanoscale features can be assessed in a variety of measurement modes. Coherent EUV light is now readily accessible in a tabletop environment with significant advances in high-harmonic generation. Utilizing a coherent EUV source allows access to traditional reflectometry and diffraction-based measurements which can be combined for information-rich measurements. This work presents a multitude of applications of coherent tabletop HHG-based light sources for the characterization of industrially relevant samples.
- 일반주제명
- Optics
- 일반주제명
- Physics
- 일반주제명
- Materials science
- 일반주제명
- Applied physics
- 키워드
- Low-dose
- 키워드
- Metrology
- 기타저자
- University of Colorado at Boulder Physics
- 기본자료저록
- Dissertations Abstracts International. 86-03B.
- 전자적 위치 및 접속
- 로그인 후 원문을 볼 수 있습니다.
MARC
008250123s2024 us c eng d■001000017161935
■00520250211151504
■006m o d
■007cr#unu||||||||
■020 ▼a9798384052371
■035 ▼a(MiAaPQ)AAI31298546
■040 ▼aMiAaPQ▼cMiAaPQ
■0820 ▼a535
■1001 ▼aJenkins, Nicholas Wilhelm.▼0(orcid)0000-0001-5725-0658
■24510▼aTabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures
■260 ▼a[Sl]▼bUniversity of Colorado at Boulder▼c2024
■260 1▼aAnn Arbor▼bProQuest Dissertations & Theses▼c2024
■300 ▼a193 p
■500 ▼aSource: Dissertations Abstracts International, Volume: 86-03, Section: B.
■500 ▼aAdvisor: Murnane, Margaret M.
■5021 ▼aThesis (Ph.D.)--University of Colorado at Boulder, 2024.
■520 ▼aNanoscale fabrication has progressed to the level where detailed near-nanometer structures can be routinely produced. As fabrication scales shrink to atomistic scales, a corresponding need for high-precision characterization is in demand. Extreme ultraviolet light (EUV) for patterning small- scale features has seen considerable development and application in recent years. Similarly, EUV light offers outstanding advantages for characterization and metrology. In particular, by utilizing a coherent EUV source, detailed nanoscale features can be assessed in a variety of measurement modes. Coherent EUV light is now readily accessible in a tabletop environment with significant advances in high-harmonic generation. Utilizing a coherent EUV source allows access to traditional reflectometry and diffraction-based measurements which can be combined for information-rich measurements. This work presents a multitude of applications of coherent tabletop HHG-based light sources for the characterization of industrially relevant samples.
■590 ▼aSchool code: 0051.
■650 4▼aOptics
■650 4▼aPhysics
■650 4▼aMaterials science
■650 4▼aApplied physics
■653 ▼aCoherent diffractive imaging
■653 ▼aExtreme ultraviolet light
■653 ▼aHigh-harmonic generation
■653 ▼aLow-dose
■653 ▼aMetrology
■690 ▼a0752
■690 ▼a0794
■690 ▼a0605
■690 ▼a0215
■71020▼aUniversity of Colorado at Boulder▼bPhysics.
■7730 ▼tDissertations Abstracts International▼g86-03B.
■790 ▼a0051
■791 ▼aPh.D.
■792 ▼a2024
■793 ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17161935▼nKERIS▼z이 자료의 원문은 한국교육학술정보원에서 제공합니다.
