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Fabrication and Characterization of Atomic Level Defects in hBN Using Electron and Ion Beam Microscopes
Fabrication and Characterization of Atomic Level Defects in hBN Using Electron and Ion Bea...
Fabrication and Characterization of Atomic Level Defects in hBN Using Electron and Ion Beam Microscopes

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자료유형  
 학위논문 서양
최종처리일시  
20260202104846
ISBN  
9798297601093
DDC  
540
저자명  
Byrne, Dana Orion.
서명/저자  
Fabrication and Characterization of Atomic Level Defects in hBN Using Electron and Ion Beam Microscopes
발행사항  
[Sl] : University of California, Berkeley, 2025
발행사항  
Ann Arbor : ProQuest Dissertations & Theses, 2025
형태사항  
125 p
주기사항  
Source: Dissertations Abstracts International, Volume: 87-04, Section: B.
주기사항  
Advisor: Minor, Andrew M.;Francis, Matthew B.
학위논문주기  
Thesis (Ph.D.)--University of California, Berkeley, 2025.
초록/해제  
요약Vacancy defects in 2D materials offer a versatile pathway for engineering new functionalities on the nano- and atomic scale. This dissertation develops and applies advanced techniques for fabricating and characterizing such defects in 2D hexagonal boron nitride (hBN) using ion and electron beam microscopes.At the nanoscale, focused ion beam techniques leveraging neutral Ga cluster emission are used to fabricate vacancy defect clusters ("nanopores") in multilayer hBN, and at the atomic scale, a decoupled light ion seeding and electron-/thermally-assisted growth approach is used to fabricate four-atom vacancies ("tetravacancies") in monolayer hBN. In both cases, the techniques developed emphasize both throughput and control for size-selective membrane applications. The tetravacancy structures are particularly well suited for mechanosensitive ion transport due to their precise size and electrostatic environment. To asses the chemical structure of the defects, a broad-beam electron energy loss spectroscopy screening method is introduced, revealing distinct boron K-edge fine structure features that correlate with hBN defectivity, enabling defect identification in the delicate monolayer samples even in the presence of surface contamination.Finally, spatially resolved electron energy loss spectroscopy and electron ptychography are used to probe the edge structure of individual defects. Variations in microscope operating parameters highlight the sensitivity of defect structure to imaging conditions and distinct spectral differences reveal defect expansion leading to different edge terminations as a result. Together, the fabrication and advanced characterization approaches developed here offer a robust framework for advancing 2D materials toward the realization of tailored functionalities for next-generation devices and technologies.
일반주제명  
Chemistry
일반주제명  
Materials science
일반주제명  
Analytical chemistry
일반주제명  
Nanoscience
키워드  
2D materials
키워드  
Defects
키워드  
Electron energy loss spectroscopy (eels)
키워드  
2D hexagonal boron nitride
키워드  
Ion beam microscopy
키워드  
Transmission electron microscopy
기타저자  
University of California, Berkeley Chemistry
기본자료저록  
Dissertations Abstracts International. 87-04B.
전자적 위치 및 접속  
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MARC

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■00520260202104846
■006m          o    d                
■007cr#unu||||||||
■020    ▼a9798297601093
■035    ▼a(MiAaPQ)AAI32173853
■040    ▼aMiAaPQ▼cMiAaPQ
■0820  ▼a540
■1001  ▼aByrne,  Dana  Orion.
■24510▼aFabrication  and  Characterization  of  Atomic  Level  Defects  in  hBN  Using  Electron  and  Ion  Beam  Microscopes
■260    ▼a[Sl]▼bUniversity  of  California,  Berkeley▼c2025
■260  1▼aAnn  Arbor▼bProQuest  Dissertations  &  Theses▼c2025
■300    ▼a125  p
■500    ▼aSource:  Dissertations  Abstracts  International,  Volume:  87-04,  Section:  B.
■500    ▼aAdvisor:  Minor,  Andrew  M.;Francis,  Matthew  B.
■5021  ▼aThesis  (Ph.D.)--University  of  California,  Berkeley,  2025.
■520    ▼aVacancy  defects  in  2D  materials  offer  a  versatile  pathway  for  engineering  new  functionalities  on  the  nano-  and  atomic  scale.  This  dissertation  develops  and  applies  advanced  techniques  for  fabricating  and  characterizing  such  defects  in  2D  hexagonal  boron  nitride  (hBN)  using  ion  and  electron  beam  microscopes.At  the  nanoscale,  focused  ion  beam  techniques  leveraging  neutral  Ga  cluster  emission  are  used  to  fabricate  vacancy  defect  clusters  ("nanopores")  in  multilayer  hBN,  and  at  the  atomic  scale,  a  decoupled  light  ion  seeding  and  electron-/thermally-assisted  growth  approach  is  used  to  fabricate  four-atom  vacancies  ("tetravacancies")  in  monolayer  hBN.  In  both  cases,  the  techniques  developed  emphasize  both  throughput  and  control  for  size-selective  membrane  applications.  The  tetravacancy  structures  are  particularly  well  suited  for  mechanosensitive  ion  transport  due  to  their  precise  size  and  electrostatic  environment.  To  asses  the  chemical  structure  of  the  defects,  a  broad-beam  electron  energy  loss  spectroscopy  screening  method  is  introduced,  revealing  distinct  boron  K-edge  fine  structure  features  that  correlate  with  hBN  defectivity,  enabling  defect  identification  in  the  delicate  monolayer  samples  even  in  the  presence  of  surface  contamination.Finally,  spatially  resolved  electron  energy  loss  spectroscopy  and  electron  ptychography  are  used  to  probe  the  edge  structure  of  individual  defects.  Variations  in  microscope  operating  parameters  highlight  the  sensitivity  of  defect  structure  to  imaging  conditions  and  distinct  spectral  differences  reveal  defect  expansion  leading  to  different  edge  terminations  as  a  result.  Together,  the  fabrication  and  advanced  characterization  approaches  developed  here  offer  a  robust  framework  for  advancing  2D  materials  toward  the  realization  of  tailored  functionalities  for  next-generation  devices  and  technologies.
■590    ▼aSchool  code:  0028.
■650  4▼aChemistry
■650  4▼aMaterials  science
■650  4▼aAnalytical  chemistry
■650  4▼aNanoscience
■653    ▼a2D  materials
■653    ▼aDefects
■653    ▼aElectron  energy  loss  spectroscopy  (eels)
■653    ▼a2D  hexagonal  boron  nitride
■653    ▼aIon  beam  microscopy
■653    ▼aTransmission  electron  microscopy
■690    ▼a0794
■690    ▼a0485
■690    ▼a0565
■690    ▼a0486
■71020▼aUniversity  of  California,  Berkeley▼bChemistry.
■7730  ▼tDissertations  Abstracts  International▼g87-04B.
■790    ▼a0028
■791    ▼aPh.D.
■792    ▼a2025
■793    ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17359188▼nKERIS▼z이  자료의  원문은  한국교육학술정보원에서  제공합니다.

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