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Micro/Nano Fabrication of Layered Semiconductor Devices for Hardware Implementation of Neuromorphic Computing
Micro/Nano Fabrication of Layered Semiconductor Devices for Hardware Implementation of Neu...
Micro/Nano Fabrication of Layered Semiconductor Devices for Hardware Implementation of Neuromorphic Computing

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자료유형  
 학위논문 서양
최종처리일시  
20260202103644
ISBN  
9798314874394
DDC  
620.11
저자명  
Chen, Mingze.
서명/저자  
Micro/Nano Fabrication of Layered Semiconductor Devices for Hardware Implementation of Neuromorphic Computing
발행사항  
[Sl] : University of Michigan, 2025
발행사항  
Ann Arbor : ProQuest Dissertations & Theses, 2025
형태사항  
151 p
주기사항  
Source: Dissertations Abstracts International, Volume: 86-11, Section: B.
주기사항  
Advisor: Liang, Xiaogan.
학위논문주기  
Thesis (Ph.D.)--University of Michigan, 2025.
초록/해제  
요약Artificial intelligence (AI) has been extensively used in the routines of human life and shown superior efficiency in various tasks, including pattern classification, voice recognition, and language processing. However, to solve the complicated problems involving large amount of spatiotemporal data (e.g., controlling of dynamic systems), AI development is approaching the fundamental limitations of the current computing systems based on von Neumann's architecture. To overcome such technological barriers, new neuromorphic computing techniques have been being actively explored, seeking to substantially improve the energy efficiency for computing tasks and extend AI capacities. In addition, such neuromorphic computing techniques mimic the architecture and functioning of the biological neural networks and they can enable in-memory computing architectures with parallel-processing capability.To specifically improve the energy- and time-efficiency of neuromorphic computing, a range of physical systems have been proposed and investigated to serve as the computing units dedicated to hardware-based neuromorphic systems. Among these physical systems, memristors, a new class of electronic devices, have attracted tremendous attention because of their great potential for enabling low-power in-memory computing processes. However, to ultimately realize the memristor-based neuromorphic computing devices and systems for practical applications, we need to address a series of important challenges: (i) Salable nanofabrication methods for producing high-quality memritive materials are still deficient; (ii) The device physics about the unique electronic properties of memristive materials is not fully understood; and (iii) system-level integration of memristor-based neuromorphic computing devices is not fully developed.The presented dissertation projects aim to address part of the aforementioned challenges and realize the following objectives: (1) Development of a scalable nanofabrication approach, termed rubbing-induced site-selective deposition (RISS), capable of producing patterned 2D-material-based memristive device structures without additional lithographic processes; (2) Systematical investigation of the switching characteristics and mechanisms of RISS-produced Bi2Se3 memristors for neuromorphic computing applications; (3) Development of Bi2Se3-based memristive devices capable of directly extracting spatiotemporal information from analogue video signals that could be utilized for computer vision applications ; (4) Creation of Bi2Se3 memristive networks that can realize hardware implementation of neuromorphic computing frameworks for robotic vehicle control.The first part of the thesis presents an advanced nanofabrication technique, termed rubbinginduced site-selective deposition (RISS), which is capable of producing patterned 2D-layered material arrays (e.g., MoS2 and Bi2Se3) without resist-based lithography and plasma etching processes. This method can generate arrays of microscale 2D device features with a high fidelity to the designed patterns and high yield (95%) throughout centimeter-scale areas. Several critical components and factors that notably affect the final yield of RISS processes have been systematically investigated and optimized to enable scale-up device applications. The second part of the thesis presents experimental and theoretical simulation works on the unique bipolar resistive switching characteristics of RISS-produced Bi2Se3 memristors. Specifically, such a Bi2Se3 memristor exhibits a reliable dependence of conductance modulation on the duty cycle of programming pulses, a fast relaxation behavior and a low threshold field for activating memristive switching (104 to 105 V/cm). Such an observed switching characteristic (i.e., short-term memory behavior) is attributed to the field-driven drift and concentration-controlled diffusion of selenium vacancies in Bi2Se3 quintuple layers, as implied by the theoretical simulation result. Based on the aforementioned memristive switching characteristics, we utilize the output of such a device in response to analogue video scanline signals to extract simple graphic information components. We have further developed a hardware-based graphic motion sensor which can generate control command signals in response to analogue video signals with time resolution of 64μs. The fourth part of the thesis presents the construction and implementation of a neuromorphic computing system capable of processing analogue sensory signals with temporal information to generate output signals for controlling dynamic systems. Such a system features a RISS-produced memristive network that can serve as a hardware representation of the reservoir computing framework. The implementation of such a system in robotic vehicle control processes result in three orders of magnitude lower power consumption (12.5µW) in comparison with the software counterpart. In two experimental tasks, this hardware-based neuromorphic computing system exhibits a highly consistent performance in comparison with the traditional digital controllers from which this neuromorphic system learns the control functionality. The low prediction error of the hardware-based neuromorphic computing system is quantitatively indicated by relatively low normalized-root-mean-square-error (NRMSE) values of 0.11 and 1.25 for rover navigation and lever balancing tasks, respectively. The presented device structure and system framework could be further leveraged for constructing low-power hardware-based edge computing and controlling systems for a broad range of miniature robotic systems.
일반주제명  
Materials science
일반주제명  
Mechanical engineering
일반주제명  
Computer engineering
키워드  
Advanced nanofabrication
키워드  
Neuromorphic computing
키워드  
Reservoir computing
키워드  
Artificial intelligence
키워드  
Nanofabrication
기타저자  
University of Michigan Mechanical Engineering
기본자료저록  
Dissertations Abstracts International. 86-11B.
전자적 위치 및 접속  
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MARC

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■035    ▼a(MiAaPQ)umichrackham006120
■040    ▼aMiAaPQ▼cMiAaPQ
■0820  ▼a620.11
■1001  ▼aChen,  Mingze.
■24510▼aMicro/Nano  Fabrication  of  Layered  Semiconductor  Devices  for  Hardware  Implementation  of  Neuromorphic  Computing
■260    ▼a[Sl]▼bUniversity  of  Michigan▼c2025
■260  1▼aAnn  Arbor▼bProQuest  Dissertations  &  Theses▼c2025
■300    ▼a151  p
■500    ▼aSource:  Dissertations  Abstracts  International,  Volume:  86-11,  Section:  B.
■500    ▼aAdvisor:  Liang,  Xiaogan.
■5021  ▼aThesis  (Ph.D.)--University  of  Michigan,  2025.
■520    ▼aArtificial  intelligence  (AI)  has  been  extensively  used  in  the  routines  of  human  life  and  shown  superior  efficiency  in  various  tasks,  including  pattern  classification,  voice  recognition,  and  language  processing.  However,  to  solve  the  complicated  problems  involving  large  amount  of  spatiotemporal  data  (e.g.,  controlling  of  dynamic  systems),  AI  development  is  approaching  the  fundamental  limitations  of  the  current  computing  systems  based  on  von  Neumann's  architecture.  To  overcome  such  technological  barriers,  new  neuromorphic  computing  techniques  have  been  being  actively  explored,  seeking  to  substantially  improve  the  energy  efficiency  for  computing  tasks  and  extend  AI  capacities.  In  addition,  such  neuromorphic  computing  techniques  mimic  the  architecture  and  functioning  of  the  biological  neural  networks  and  they  can  enable  in-memory  computing  architectures  with  parallel-processing  capability.To  specifically  improve  the  energy-  and  time-efficiency  of  neuromorphic  computing,  a  range  of  physical  systems  have  been  proposed  and  investigated  to  serve  as  the  computing  units  dedicated  to  hardware-based  neuromorphic  systems.  Among  these  physical  systems,  memristors,  a  new  class  of  electronic  devices,  have  attracted  tremendous  attention  because  of  their  great  potential  for  enabling  low-power  in-memory  computing  processes.  However,  to  ultimately  realize  the  memristor-based  neuromorphic  computing  devices  and  systems  for  practical  applications,  we  need  to  address  a  series  of  important  challenges:  (i)  Salable  nanofabrication  methods  for  producing  high-quality  memritive  materials  are  still  deficient;  (ii)  The  device  physics  about  the  unique  electronic  properties  of  memristive  materials  is  not  fully  understood;  and  (iii)  system-level  integration  of  memristor-based  neuromorphic  computing  devices  is  not  fully  developed.The  presented  dissertation  projects  aim  to  address  part  of  the  aforementioned  challenges  and  realize  the  following  objectives:  (1)  Development  of  a  scalable  nanofabrication  approach,  termed  rubbing-induced  site-selective  deposition  (RISS),  capable  of  producing  patterned  2D-material-based  memristive  device  structures  without  additional  lithographic  processes;  (2)  Systematical  investigation  of  the  switching  characteristics  and  mechanisms  of  RISS-produced  Bi2Se3  memristors  for  neuromorphic  computing  applications;  (3)  Development  of  Bi2Se3-based  memristive  devices  capable  of  directly  extracting  spatiotemporal  information  from  analogue  video  signals  that  could  be  utilized  for  computer  vision  applications  ;  (4)  Creation  of  Bi2Se3  memristive  networks  that  can  realize  hardware  implementation  of  neuromorphic  computing  frameworks  for  robotic  vehicle  control.The  first  part  of  the  thesis  presents  an  advanced  nanofabrication  technique,  termed  rubbinginduced  site-selective  deposition  (RISS),  which  is  capable  of  producing  patterned  2D-layered  material  arrays  (e.g.,  MoS2  and  Bi2Se3)  without  resist-based  lithography  and  plasma  etching  processes.  This  method  can  generate  arrays  of  microscale  2D  device  features  with  a  high  fidelity  to  the  designed  patterns  and  high  yield  (95%)  throughout  centimeter-scale  areas.  Several  critical  components  and  factors  that  notably  affect  the  final  yield  of  RISS  processes  have  been  systematically  investigated  and  optimized  to  enable  scale-up  device  applications. The  second  part  of  the  thesis  presents  experimental  and  theoretical  simulation  works  on  the  unique  bipolar  resistive  switching  characteristics  of  RISS-produced  Bi2Se3  memristors.  Specifically,  such  a  Bi2Se3  memristor  exhibits  a  reliable  dependence  of  conductance  modulation  on  the  duty  cycle  of  programming  pulses,  a  fast  relaxation  behavior  and  a  low  threshold  field  for activating  memristive  switching  (104  to  105  V/cm).  Such  an  observed  switching  characteristic  (i.e.,  short-term  memory  behavior)  is  attributed  to  the  field-driven  drift  and  concentration-controlled  diffusion  of  selenium  vacancies  in  Bi2Se3  quintuple  layers,  as  implied  by  the  theoretical  simulation  result.  Based  on  the  aforementioned  memristive  switching  characteristics,  we  utilize  the  output  of  such  a  device  in  response  to  analogue  video  scanline  signals  to  extract  simple  graphic  information  components.  We  have  further  developed  a  hardware-based  graphic  motion  sensor  which  can  generate  control  command  signals  in  response  to  analogue  video  signals  with  time  resolution  of  64μs. The  fourth  part  of  the  thesis  presents  the  construction  and  implementation  of  a  neuromorphic  computing  system  capable  of  processing  analogue  sensory  signals  with  temporal  information  to  generate  output  signals  for  controlling  dynamic  systems.  Such  a  system  features  a  RISS-produced  memristive  network  that  can  serve  as  a  hardware  representation  of  the  reservoir  computing  framework.  The  implementation  of  such  a  system  in  robotic  vehicle  control  processes  result  in  three  orders  of  magnitude  lower  power  consumption  (12.5µW)  in  comparison  with  the  software  counterpart.  In  two  experimental  tasks,  this  hardware-based  neuromorphic  computing  system  exhibits  a  highly  consistent  performance  in  comparison  with  the  traditional  digital  controllers  from  which  this  neuromorphic  system  learns  the  control  functionality.  The  low  prediction  error  of  the  hardware-based  neuromorphic  computing  system  is  quantitatively  indicated  by  relatively  low  normalized-root-mean-square-error  (NRMSE)  values  of  0.11  and  1.25  for  rover  navigation  and  lever  balancing  tasks,  respectively.  The  presented  device  structure  and  system  framework  could  be  further  leveraged  for  constructing  low-power  hardware-based  edge  computing  and  controlling  systems  for  a  broad  range  of  miniature  robotic  systems.
■590    ▼aSchool  code:  0127.
■650  4▼aMaterials  science
■650  4▼aMechanical  engineering
■650  4▼aComputer  engineering
■653    ▼aAdvanced  nanofabrication
■653    ▼aNeuromorphic  computing
■653    ▼aReservoir  computing
■653    ▼aArtificial  intelligence
■653    ▼aNanofabrication
■690    ▼a0548
■690    ▼a0794
■690    ▼a0464
■71020▼aUniversity  of  Michigan▼bMechanical  Engineering.
■7730  ▼tDissertations  Abstracts  International▼g86-11B.
■790    ▼a0127
■791    ▼aPh.D.
■792    ▼a2025
■793    ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17358100▼nKERIS▼z이  자료의  원문은  한국교육학술정보원에서  제공합니다.

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