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Modeling of Intermediate-Pressure Argon Capacitively Coupled Plasmas with Uncertainty Quantification
Modeling of Intermediate-Pressure Argon Capacitively Coupled Plasmas with Uncertainty Quantification
상세정보
- 자료유형
- 학위논문 서양
- 최종처리일시
- 20260311091527.5
- ISBN
- 9798270229689
- DDC
- 620.001
- 서명/저자
- Modeling of Intermediate-Pressure Argon Capacitively Coupled Plasmas with Uncertainty Quantification / Juan Pablo Barberena Valencia
- 발행사항
- [Sl] : The University of Texas at Austin, 2025
- 형태사항
- 1 electronic resource (137 pages)
- 주기사항
- Source: Dissertations Abstracts International, Volume: 87-06, Section: B.
- 주기사항
- Advisors: Raja, Laxminarayan L.; Moser, Robert D. Committee members: Varghese, Philip L.; Clemens, Noel T.
- 학위논문주기
- - Ph.D. : The University of Texas at Austin, 2025.
- 초록/해제
- 요약Capacitively-coupled plasmas (CCPs) are widely employed in various applications, including the optimization of plasma reactor performance and as testbeds for the study of non-equilibrium plasma phenomena. Accurate computational simulations of CCPs are critical for capturing the key physical processes within the plasma discharge and providing reliable predictions of the system's behavior. This dissertation presents a self-consistent, one-dimensional (1D) fluid model for argon CCP discharges, incorporating a fully consistent development of a finite-rate chemistry mechanism to represent the chemical processes within the discharge, and a detailed assessment of the uncertainties associated with input parameters and embedded submodels, an aspect often overlooked in existing literature. A comprehensive validation study against experimental data across a broad range of operating conditions assesses the role of these uncertainties in discrepancies between simulation predictions and measurements. It is found that, in a 1D CCP model, uncertainties in the chemistry mechanism alone cannot fully account for deviations at higher pressures. Instead, uncertainties in parameters such as ion mobility and the effective momentum transfer cross-section significantly impact model accuracy, improving agreement with experimental observations. Furthermore, incorporating a model-form representation of higher-fidelity effects alters the discharge structure due to the inherently multidimensional nature of real CCP reactors. However, these effects and their associated uncertainties do not fully resolve all discrepancies with experimental data.Additionally, the argon chemistry was used in the context of a 0D model for a Bayesian calibration exercise. The study demonstrated the capability of refining the uncertainty distribution for specific input parameters in low-fidelity models using data from higher-fidelity simulations or experimental observations. Further, the 0D model was proved to be highly unreliable for predicting CCP behavior across a wide range of operating conditions, underscoring the necessity of using a 1D model with proper uncertainty propagation for accurate predictions.Overall, the findings from this study provide insights into the sources of model errors and contribute to the development of more robust and reliable CCP simulations, advancing the understanding of plasma behavior under a wide range of conditions. The findings highlight the importance of a probabilistic approach to modeling, laying the groundwork for data assimilation techniques that iteratively update model uncertainties and enhance predictive capabilities as new data becomes available.
- 언어주기
- English
- 일반주제명
- Fluid mechanics
- 일반주제명
- Plasma physics
- 일반주제명
- Computational physics
- 기타저자
- The University of Texas at Austin Aerospace Engineering
- 기본자료저록
- Dissertations Abstracts International. 87-06B.
- 전자적 위치 및 접속
- 로그인 후 원문을 볼 수 있습니다.
MARC
008260311s2025 us eng d■001000017361304
■00520260311091527.5
■006m o d
■007cr|nu||||||||
■020 ▼a9798270229689
■040 ▼aMiAaPQD▼beng▼cMiAaPQD▼erda
■082 ▼a620.001
■1001 ▼aBarberena Valencia, Juan Pablo▼eauthor.
■24510▼aModeling of Intermediate-Pressure Argon Capacitively Coupled Plasmas with Uncertainty Quantification ▼cJuan Pablo Barberena Valencia
■260 ▼a[Sl]▼bThe University of Texas at Austin▼c2025
■264 1▼aAnn Arbor▼bProQuest Dissertations & Theses▼c2025
■300 ▼a1 electronic resource (137 pages)
■336 ▼atext▼btxt▼2rdacontent
■337 ▼acomputer▼bc▼2rdamedia
■338 ▼aonline resource▼bcr▼2rdacarrier
■500 ▼aSource: Dissertations Abstracts International, Volume: 87-06, Section: B.
■500 ▼aAdvisors: Raja, Laxminarayan L.; Moser, Robert D. Committee members: Varghese, Philip L.; Clemens, Noel T.
■5021 ▼bPh.D.▼cThe University of Texas at Austin▼d2025.
■520 ▼aCapacitively-coupled plasmas (CCPs) are widely employed in various applications, including the optimization of plasma reactor performance and as testbeds for the study of non-equilibrium plasma phenomena. Accurate computational simulations of CCPs are critical for capturing the key physical processes within the plasma discharge and providing reliable predictions of the system's behavior. This dissertation presents a self-consistent, one-dimensional (1D) fluid model for argon CCP discharges, incorporating a fully consistent development of a finite-rate chemistry mechanism to represent the chemical processes within the discharge, and a detailed assessment of the uncertainties associated with input parameters and embedded submodels, an aspect often overlooked in existing literature. A comprehensive validation study against experimental data across a broad range of operating conditions assesses the role of these uncertainties in discrepancies between simulation predictions and measurements. It is found that, in a 1D CCP model, uncertainties in the chemistry mechanism alone cannot fully account for deviations at higher pressures. Instead, uncertainties in parameters such as ion mobility and the effective momentum transfer cross-section significantly impact model accuracy, improving agreement with experimental observations. Furthermore, incorporating a model-form representation of higher-fidelity effects alters the discharge structure due to the inherently multidimensional nature of real CCP reactors. However, these effects and their associated uncertainties do not fully resolve all discrepancies with experimental data.Additionally, the argon chemistry was used in the context of a 0D model for a Bayesian calibration exercise. The study demonstrated the capability of refining the uncertainty distribution for specific input parameters in low-fidelity models using data from higher-fidelity simulations or experimental observations. Further, the 0D model was proved to be highly unreliable for predicting CCP behavior across a wide range of operating conditions, underscoring the necessity of using a 1D model with proper uncertainty propagation for accurate predictions.Overall, the findings from this study provide insights into the sources of model errors and contribute to the development of more robust and reliable CCP simulations, advancing the understanding of plasma behavior under a wide range of conditions. The findings highlight the importance of a probabilistic approach to modeling, laying the groundwork for data assimilation techniques that iteratively update model uncertainties and enhance predictive capabilities as new data becomes available.
■546 ▼aEnglish
■590 ▼aSchool code: 0227
■650 4▼aFluid mechanics
■650 4▼aPlasma physics
■650 4▼aComputational physics
■653 ▼aCapacitively-coupled plasmas
■653 ▼aBayesian calibration
■653 ▼aComputational simulations
■653 ▼aLow-fidelity models
■7102 ▼aThe University of Texas at Austin▼bAerospace Engineering.▼edegree granting institution.
■7201 ▼aRaja, Laxminarayan L.▼edegree supervisor.
■7201 ▼aMoser, Robert D.▼edegree supervisor.
■7730 ▼tDissertations Abstracts International▼g87-06B.
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17361304▼nKERIS▼z이 자료의 원문은 한국교육학술정보원에서 제공합니다.
