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Development of a Non-Invasive Diagnostic Using Optical Emission Spectroscopy to Measure Plasma Parameters in Low-Pressure Oxygen Plasmas
Development of a Non-Invasive Diagnostic Using Optical Emission Spectroscopy to Measure Plasma Parameters in Low-Pressure Oxygen Plasmas
상세정보
- 자료유형
- 학위논문 서양
- 최종처리일시
- 20260202105138
- ISBN
- 9798293807475
- DDC
- 530
- 서명/저자
- Development of a Non-Invasive Diagnostic Using Optical Emission Spectroscopy to Measure Plasma Parameters in Low-Pressure Oxygen Plasmas
- 발행사항
- [Sl] : The University of Wisconsin - Madison, 2025
- 발행사항
- Ann Arbor : ProQuest Dissertations & Theses, 2025
- 형태사항
- 188 p
- 주기사항
- Source: Dissertations Abstracts International, Volume: 87-03, Section: B.
- 주기사항
- Advisor: Wendt, Amy.
- 학위논문주기
- Thesis (Ph.D.)--The University of Wisconsin - Madison, 2025.
- 초록/해제
- 요약The implementation and evaluation of a non-invasive diagnostic method using the light emitted from a pure oxygen plasma to determine electron temperature and dissociation fraction in low-pressure oxygen plasmas is described in this dissertation. Inelastic collisions involving energetic electrons drive excitation, ionization and dissociation processes that are critical to "low-temperature" plasma technological applications. In some applications, oxygen plasmas are used for their surface modification abilities, where dissociation of oxygen molecules leads to production of reactive O atoms. Diagnostics to determine the electron temperature and the relative abundances of oxygen atoms and molecules (described by a dissociation fraction) are of interest for improved design, modeling and control of oxygen plasma processes.An emission model relating oxygen spectra to plasma parameters is developed and serves as the basis of a diagnostic that compares calculated to observed emissions (measured by optical emission spectroscopy) to determine plasma parameters. Experimentally measured number densities and published collision probabilities enable calculations of light intensities for a set of seven characteristic emission wavelengths emitted by atomic and molecular ion states identified to have sensitivity to plasma parameters. Certain critical excitation rates unavailable for molecular ion excitation were measured in a separate experiment. Despite the abundance of O2 in the discharge, it plays a minor role in the diagnostic method because it produces few measurable emissions and makes little contribution to atomic and molecular ion emissions due to high energy thresholds.The diagnostic method was tested on an inductively coupled oxygen plasma for a range of pressures (1-80 mTorr) and powers (250-2000 W). Measurements of electron temperature and dissociation fraction are obtained by using a mixture of atomic and molecular ion emissions, where fitting intensities rather than a simpler line ratio approach is necessary to increase the precision and accuracy of results. Assessments of diagnostic limitations show a non-Maxwellian EEDF may explain outstanding discrepancies in dissociation fraction results for certain conditions.
- 일반주제명
- Plasma physics
- 일반주제명
- Engineering
- 일반주제명
- Materials science
- 키워드
- Oxygen plasma
- 기타저자
- The University of Wisconsin - Madison Materials Science and Engineering
- 기본자료저록
- Dissertations Abstracts International. 87-03B.
- 전자적 위치 및 접속
- 로그인 후 원문을 볼 수 있습니다.
MARC
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■00520260202105138
■006m o d
■007cr#unu||||||||
■020 ▼a9798293807475
■035 ▼a(MiAaPQ)AAI32240369
■040 ▼aMiAaPQ▼cMiAaPQ
■0820 ▼a530
■1001 ▼aPachicano, Jessica L.
■24510▼aDevelopment of a Non-Invasive Diagnostic Using Optical Emission Spectroscopy to Measure Plasma Parameters in Low-Pressure Oxygen Plasmas
■260 ▼a[Sl]▼bThe University of Wisconsin - Madison▼c2025
■260 1▼aAnn Arbor▼bProQuest Dissertations & Theses▼c2025
■300 ▼a188 p
■500 ▼aSource: Dissertations Abstracts International, Volume: 87-03, Section: B.
■500 ▼aAdvisor: Wendt, Amy.
■5021 ▼aThesis (Ph.D.)--The University of Wisconsin - Madison, 2025.
■520 ▼aThe implementation and evaluation of a non-invasive diagnostic method using the light emitted from a pure oxygen plasma to determine electron temperature and dissociation fraction in low-pressure oxygen plasmas is described in this dissertation. Inelastic collisions involving energetic electrons drive excitation, ionization and dissociation processes that are critical to "low-temperature" plasma technological applications. In some applications, oxygen plasmas are used for their surface modification abilities, where dissociation of oxygen molecules leads to production of reactive O atoms. Diagnostics to determine the electron temperature and the relative abundances of oxygen atoms and molecules (described by a dissociation fraction) are of interest for improved design, modeling and control of oxygen plasma processes.An emission model relating oxygen spectra to plasma parameters is developed and serves as the basis of a diagnostic that compares calculated to observed emissions (measured by optical emission spectroscopy) to determine plasma parameters. Experimentally measured number densities and published collision probabilities enable calculations of light intensities for a set of seven characteristic emission wavelengths emitted by atomic and molecular ion states identified to have sensitivity to plasma parameters. Certain critical excitation rates unavailable for molecular ion excitation were measured in a separate experiment. Despite the abundance of O2 in the discharge, it plays a minor role in the diagnostic method because it produces few measurable emissions and makes little contribution to atomic and molecular ion emissions due to high energy thresholds.The diagnostic method was tested on an inductively coupled oxygen plasma for a range of pressures (1-80 mTorr) and powers (250-2000 W). Measurements of electron temperature and dissociation fraction are obtained by using a mixture of atomic and molecular ion emissions, where fitting intensities rather than a simpler line ratio approach is necessary to increase the precision and accuracy of results. Assessments of diagnostic limitations show a non-Maxwellian EEDF may explain outstanding discrepancies in dissociation fraction results for certain conditions.
■590 ▼aSchool code: 0262.
■650 4▼aPlasma physics
■650 4▼aEngineering
■650 4▼aMaterials science
■653 ▼aLow-pressure plasma
■653 ▼aLow-temperature plasma
■653 ▼aOptical emission spectroscopy
■653 ▼aOxygen plasma
■690 ▼a0759
■690 ▼a0537
■690 ▼a0794
■71020▼aThe University of Wisconsin - Madison▼bMaterials Science and Engineering.
■7730 ▼tDissertations Abstracts International▼g87-03B.
■790 ▼a0262
■791 ▼aPh.D.
■792 ▼a2025
■793 ▼aEnglish
■85640▼uhttp://www.riss.kr/pdu/ddodLink.do?id=T17359566▼nKERIS▼z이 자료의 원문은 한국교육학술정보원에서 제공합니다.
